Glove box for semiconductor explosion-proof coating purification system
Ultra low water oxygen control: The concentration of water and oxygen is strictly controlled at ≤ 0.1ppm, providing an extremely pure processing environment for semiconductor materials and ensuring high performance and stability of the devices
Explosion proof design of the box: made of 304 stainless steel material Efficient gas purification circulation system: equipped with copper catalyst and molecular sieve, effectively removing water and oxygen, with circulation capacity Intelligent control system: using PLC touch screen control to achieve self diagnosis, power-off self start, pressure control, and adaptive functions High standard leakage rate: The leakage rate of the box is less than 0.001vol%/h, far below the industry standard, ensuring that the environment inside the box is not affected by external factors Multi functional ransition compartment: equipped with large and small trans
Explosion proof design of the box: made of 304 stainless steel material Efficient gas purification circulation system: equipped with copper catalyst and molecular sieve, effectively removing water and oxygen, with circulation capacity Intelligent control system: using PLC touch screen control to achieve self diagnosis, power-off self start, pressure control, and adaptive functions High standard leakage rate: The leakage rate of the box is less than 0.001vol%/h, far below the industry standard, ensuring that the environment inside the box is not affected by external factors Multi functional ransition compartment: equipped with large and small trans
